| 보유기관명 |
경북대학교 |
| 보유기관코드 |
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| 활용범위 |
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| 활용상태 |
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| 표준코드 |
C502 |
| 표준분류명 |
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| 시설장비 설명 |
PR COATER(제작사 : SAWATEC Model : SM180BT) - Process controller with touch panel display to select parameters : speed time acceleration pos./neg. - Up to 10 pairs of speed/time values selectable to store up to 10 recipes - Max. spinning rotation 6000rpm +/- 1rpm - POM made bowl assembly is capable of spinning up to 6 or 5x5 substrates-substrate fixation via vacuum and safety interlock protection - Substrate loading manual - Manual cover made of PET with adjustable air flow inlet - Acoustic alarm when process has finalized - Exhaust and drain connections - Required medias : 240VAC/50Hz compressed air technical vacuum exhaust - Acceptance test at SAWATEC Liechtenstein - 4 Vacuum Chuck : 1 PC - 6" Vacuum Chuck :1 PC - Dosing arm fir manual dispensing via a syringe : 1 PC - Automatic cartridge dispense system with adjustable pressure control and gauge integrated into spin processor incl. suck back function : 1 PC - Glass syringe 50 cc : 3 PC - Adaptor to hold the 50 cc syringe : 3 PC - Pressure connector for the 50 cc syringe : 3 PC - Suck back valve RV-151 : 3 PCPR coating develop 등 |
| 장비이미지코드 |
http://nfec.ntis.go.kr/storage/images/equip/photo/201404/.thumb/20140404121742655.jpg |
| 장비위치주소 |
대구 북구 산격3동 경북대학교 1370 경북대학교 반도체연구동 지하1층 B103 |
| NFEC 등록번호 |
NFEC-2007-10-008990 |
| 예약방법 |
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| 카타로그 URL |
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| 메뉴얼 URL |
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| 원문 URL |
http://www.zeus.go.kr/equip/read?equipId=Z-NTIS-0001821 |
| 첨부파일 |
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