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특허/실용신안
SOURCE FOR SELECTIVELY PROVIDING POSITIVELY OR NEGATIVELY CHARGED PARTICLES FOR A FOCUSING COLUMN
특허 실용신안 개요
| 기관명 | NDSL |
|---|---|
| 출원인 | FEI Company |
| 출원번호 | US-0052650 |
| 출원일자 | 2016-02-24 |
| 공개번호 | 20160616 |
| 공개일자 | 0000-00-00 |
| 등록번호 | |
| 등록일자 | 0000-00-00 |
| 권리구분 | USAP |
| 초록 | A single column charged particle source with user selectable configurations operates in ion-mode for FIB operations or electron mode for SEM operations. Equipped with an x-ray detector, energy dispersive x-ray spectroscopy analysis is possible. A user can selectively configure the source to prepare a sample in the ion-mode or FIB mode then essentially flip a switch selecting electron-mode or SEM mode and analyze the sample using EDS or other types of analysis. |
| 원문URL | http://click.ndsl.kr/servlet/OpenAPIDetailView?keyValue=03553784&target=USAP&cn=USA2016060172156 |
| 첨부파일 |
추가정보
| 과학기술표준분류 | |
|---|---|
| ICT 기술분류 | |
| IPC분류체계CODE | H01J-037/285(2006.01),H01J-037/305(2006.01),H01J-037/147(2006.01),H01J-037/10(2006.01),H01J-037/077( |
| 주제어 (키워드) |